3 rods Graphene growth system

Using CVD method is not only for preparation of single, double,multilayer graphene film but also for other CVD experiment


 
Key Features

3-rods-Graphene
Technical Specification

Product Model

TI-O1200-803ZV10

H2 gas range

0~200SCCM

Maximum Temperature

1200OC

Ar2 gas range

0~500SCCM

Working Temperature

≦1100OC

Carbon source range

0~100SCCM

Temperature Accuracy

±1

Sealing way

Vacuum flange

Heating Zone Length

440mm

Tube material

High purity quartz

Temperature Control

Multiple segment programmable curve

Water cooling mode

Water chiller and water-cooling flange

Constant Temp. Zone

200mm

Water flow

10L/min

Tube Diameter

80mm

Vacuum meter

Digital

Tube Length

1400mm

Vacuum degree range

5×10E-5 ~ 1500mbar

Moving Way

Rail Mode

Product origin

Switzerland

Gas Channel

3

Vacuum pump

Double rotary-vane pump

Gas Type

H2 Ar2 C2H2

Total power

5KW

Measurement Model

Mass Flow meter

Power supply

AC:220V 50Hz