Auto Strain Mapping

Novel Automated Strain Mapping Solution for TEM/STEM (Patent pending) based on nanobeam precession diffraction patterrns in combination with DigiSTAR. Precision up 0.02% (200kV FEG) with spatial resolution up to 2nm attainable (FEG-TEM).

  Measurement of strain with high spatial resolution and high precision in semiconductor devices is critical to monitor the designed and unintended strain distributions

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Auto Strain Mapping

Auto Strain Mapping