PECVD System For Low Temp

This System is PECVD System For Low Temp. and it used for Small rf—PECVD and CNT synthesis.

Feature of Pecvd System For Low Temp

  • Small rf—PECVD system for CNT(Carbon Nano Tube) synthesis
  • Low temperature synthesis of CNTs(under about 400°C)
  • Heating range 400 — 600t
  • Applications CNTs growth
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