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Etching System Equipped with High Density Plasma |
High
Density Plasma Etcher for Magnetic
Materials |
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Cat 1 |
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Title : [08/06/30] A-Tech System developed a PECVD system
for antireflective coatings of solar cell A-Tech System finished
a PECVD system development for R&D of solar cell antireflective
coatings, which is largely-demanded in recent. The system was
developed for the purpose of process _evaluation prior to solar
cell manufacturing or new process development and it has the
characteristics of producing highly uniform layer on cell in a
short cycle time. Also the equipment was designed to be
compatibly equipped with RF, MF, VHF power supplies. [attached
file:
PECVD AR-200]
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Cat 2 |
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Title : [08/01/03] A-Tech System developed
polycrystalline silicon ingot growth equipment(Model: ATS-PSI
250) for solar cellA-Tech System completed the development of
polysilicon growth equipment for solar cell applications. This
project has been performed with Incheon University for 1 year
since 2007. This system was evaluated, Compared to the products
of current overseas manufacturers on the basis of quality,
throughput and price competitiveness, the ATS-PSI 250 was
evaluated to be superior to the products of overseas companies
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polycrystalline
silicon ingot
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ATS-PSI 250 |
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