Title : [08/06/30] A-Tech System developed a PECVD system for antireflective coatings of solar cell A-Tech System finished a PECVD system development for R&D of solar cell antireflective coatings, which is largely-demanded in recent. The system was developed for the purpose of process _evaluation prior to solar cell manufacturing or new process development and it has the characteristics of producing highly uniform layer on cell in a short cycle time. Also the equipment was designed to be compatibly equipped with RF, MF, VHF power supplies. [attached file: PECVD AR-200]

Title : [08/01/03] A-Tech System developed polycrystalline silicon ingot growth equipment(Model: ATS-PSI 250) for solar cellA-Tech System completed the development of polysilicon growth equipment for solar cell applications. This project has been performed with Incheon University for 1 year since 2007. This system was evaluated, Compared to the products of current overseas manufacturers on the basis of quality, throughput and price competitiveness, the ATS-PSI 250 was evaluated to be superior to the products of overseas companies