Enhanced EELS & EDX Spectroscopy

Beam Precession in EELS & EDX spectroscopy enhance the signal reducing channeling effects. Automated quantification with statistical error analysis is available. Multiple scattering derived from an automatically measured relative thickness.

Feature of EELX & EDX

  • Highly-automated EELS elemental analysis.
  • Minimal user input required.
  • Multiple scattering derived from an automatically measured relative thickness
  • Automated quantification with statistical error analysis.
  • Elemental core-loss edges from several possible sources.
  • Theoretical : Hartree-Slater (Rez)
  • Intuitive workflow
  • Specify elements to quanitfy.
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